Novel materials and processes for advanced CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. : 2002 MRS fall meeting in Boston : Dec 2002, Boston, MA.

• 資料種別: 図書
• ISBN: 1558996826
• タイトル: Novel materials and processes for advanced CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A. : 2002 MRS fall meeting in Boston : Dec 2002, Boston, MA.
• シリーズタイトル: Materials Research Society Symposia Proceedings ; 745
• タイトル標目: Materials Research Society symposia proceedings ; v. 745.
• 著者標目: Materials Research Society.; Gardner, Mark I.; Symposium N, "Novel Materials and Processes for Advanced CMOS" (2002 : Boston, Mass.)
• 出版事項: Warrendale : Materials Research Society
• 出版年月日等: c2003.
• 出版年（W3CDTF）: 2003
• 数量: xiii, 384 p. : ill. ; 24 cm.
• 出版地（国名コード）: US
• 本文の言語コード: eng
• 件名標目: Metal oxide semiconductors -- Materials -- Congresses.; Metal oxide semiconductors, Complementary -- Materials -- Congresses.; Nanostructure materials -- Congresses.; Gate array circuits -- Materials -- Congresses.; Dielectrics -- Congresses.
• NDLC: M17
• 一般注記: Papers.; "Papers presented at Symposium N, "Novel Materials and Processes for Advanced CMOS, " held ... at the 2002 MRS Fall Meeting" -- preface.
• 書誌注記: Includes bibliographical references and indexes.
• 所蔵機関: 国立国会図書館
• 請求記号: M17-03-1779
• 連携機関・データベース: 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• 書誌ID（NDLBibID）: 000004153837; http://id.ndl.go.jp/bib/000004153837
• RLIN番号: FLUGAPD4609-B
• 整理区分コード: 215