International conference on micro- and nano-electronics 2021 : 4-8 October 2021 : Zvenigorod, Russian Federation : 14th international conference "micro- and nanoelectronics--2021" : ICMNE-2021 : SPIE-affiliated conference : Oct 2021, ------.
(SPIE Proceedings ; 12157)
国立国会図書館請求記号
M17-22-694
国立国会図書館書誌ID
032030332
資料種別
図書
著者
Russian Academy of Sciences. Institute of Physics and Technology.
Selected papers."ICMNE is a biannual conference ..."--Introduction."For the first time, a hybrid online/offline participation format was used for ICMN...