Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing

• 資料種別: 図書
• ISBN: 156677201X
• タイトル: Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing
• 著者・編者: editors, S. Raghavan, R.L. Opila, L. Zhang ; Electronics and Dielectric Science and Technology Divisions [of the Electrochemical Society]
• 著者標目: International Symposium on Chemical Mechanical Planarization; https://ci.nii.ac.jp/author/DA10888875; Raghavan, S. (Srini); https://ci.nii.ac.jp/author/DA10888897; Opila, Robert Leon; https://ci.nii.ac.jp/author/DA12254039; Zhang, L.; Electrochemical Society. Electronics Division; https://ci.nii.ac.jp/author/DA0357072X; Electrochemical Society. Dielectric Science and Technology Division; https://ci.nii.ac.jp/author/DA06421624; Electrochemical Society. Meeting; https://ci.nii.ac.jp/author/DA03398898
• 出版事項: Electrochemical Society
• 出版年月日等: c1998
• 出版年（W3CDTF）: 1998
• 大きさ: 23 cm
• 並列タイトル等: Chemical mechanical planarization in integrated circuit device manufacturing
• 出版地（国名コード）: us
• 本文の言語コード: en
• 件名標目: Microelectronics -- Materials Congresses; Grinding and polishing Congresses; Metals -- Pickling Congresses; Semiconductors -- Surfaces Congresses
• LCC: TK7871
• 対象利用者: 一般
• 一般注記: "Electronics and Dielectric Science and Technology Divisions."; "This volume contains most of the papers presented at the Second International Symposium on Chemical Mechanical Planarization (CMP) in Integrated Circuit (IC) Device Manufacturing held at the 193rd Annual Meeting of Electrochemical Society in San Diego during May 5-7, 1998."; Includes bibliographical references and indexes
• 関連情報: Proceedings; https://cir.nii.ac.jp/crid/1130282269273401728
• 関連情報（URI）: https://ci.nii.ac.jp/ncid/BA4328413X#entity; https://lccn.loc.gov/99196375
• 掲載誌: Proceedings; https://cir.nii.ac.jp/crid/1130282269273401728
• 連携機関・データベース: 国立情報学研究所 : CiNii Research
• 提供元機関・データベース: CiNii Books; https://ci.nii.ac.jp/books
• NACSIS書誌ID（NCID）: https://ci.nii.ac.jp/ncid/BA4328413X : BA4328413X
• LC control number: 99196375; https://lccn.loc.gov/99196375