Fifth International Vacuum Congress proceedings issue

• 資料種別: 図書
• タイトル: Fifth International Vacuum Congress proceedings issue
• 著者・編者: editor, P. A. Redhead ; associated editor, G. Ehrlich ... [et al.] ; editorial board, R. W. Hoffman ... [et. al.] ; assistant to the editor, Jill Baker
• 著者標目: International Vacuum Congress; https://ci.nii.ac.jp/author/DA03130909; Redhead, P. A.; https://ci.nii.ac.jp/author/DA0084122X; American Vacuum Society; https://ci.nii.ac.jp/author/DA03926125; Ehrlich, G.; Hoffman, R. W.; https://ci.nii.ac.jp/author/DA11701426; Baker, Jill; International Union of Vacuum Science, Technology and Application
• 出版事項: The American Institute of Physics
• 出版年月日等: c1972
• 出版年（W3CDTF）: 1972
• 大きさ: 29 cm
• 並列タイトル等: Proceedings of the Fifth International Vacuum Congress, 11-15 October 1971, Sheraton-Boston Hotel, Boston, Mass. U.S.A
• 出版地（国名コード）: us
• 本文の言語コード: en
• 件名標目: Photolithography -- Congresses; Lithography, Electron beam -- Congresses; Ion beam lithography -- Congresses; X-ray lithography -- Congresses; Photoresists -- Congresses
• LCC: TR940
• 対象利用者: 一般
• 一般注記: Title from cover; "Sponsored by the International Union of Vacuum Science Technology abd Application and the American Vacuum Society"; "The official journal of the American Vacuum Society"
• 関連情報: Journal of vacuum science & technology; https://cir.nii.ac.jp/crid/1130000797417835392
• 関連情報（URI）: https://ci.nii.ac.jp/ncid/BA38455619#entity
• 掲載誌: Journal of vacuum science & technology; https://cir.nii.ac.jp/crid/1130000797417835392
• 連携機関・データベース: 国立情報学研究所 : CiNii Research; https://cir.nii.ac.jp/
• 提供元機関・データベース: CiNii Books; https://ci.nii.ac.jp/books
• NACSIS書誌ID（NCID）: https://ci.nii.ac.jp/ncid/BA38455619 : BA38455619