Analysis of Cluster Growth in Magnetron-sputtering Metal-cluster Source by Optical Emission Spectroscopy

• 資料種別: 記事
• タイトル: Analysis of Cluster Growth in Magnetron-sputtering Metal-cluster Source by Optical Emission Spectroscopy
• 著者標目: Satoshi Kono; Masashi Arakawa; https://orcid.org/0000-0002-5954-8893; Akira Terasaki
• 出版年月日等: 2019-12-05
• 出版年（W3CDTF）: 2019-12-05
• タイトル（掲載誌）: Chemistry Letters
• 巻号年月日等（掲載誌）: 48 12
• 掲載巻: 48
• 掲載号: 12
• 掲載ページ: 1537-1540
• 掲載年月日（W3CDTF）: 2019-12-05
• ISSN（掲載誌）: 03667022
• 出版事項（掲載誌）: Oxford University Press (OUP)
• 件名標目: General Chemistry
• 対象利用者: 一般
• DOI: 10.1246/cl.190727
• 作成日（W3CDTF）: 2019-10-18
• 関連情報（URI）: http://www.journal.csj.jp/doi/pdf/10.1246/cl.190727
• 参照: Unisized two-dimensional platinum clusters on silicon(111)-7×7 surface observed with scanning tunneling microscope; https://cir.nii.ac.jp/crid/1360011144619692800; Development of High-flux Ion Source for Size-selected Nanocluster Ions Based on High-power Impulse Magnetron Sputtering; https://cir.nii.ac.jp/crid/1360283694082098176; Extended Smoluchowski Model for the Formation of Size-Selected Silver Nanoclusters Generated via Modulated Pulsed Power Magnetron Sputtering; https://cir.nii.ac.jp/crid/1360285708110716160; Laser induced fluorescence of metal clusters produced by laser vaporization: Gas phase spectrum of Pb2; https://cir.nii.ac.jp/crid/1360292619358771968; Ionization of sputtered metals in high power pulsed magnetron sputtering; https://cir.nii.ac.jp/crid/1360292620542604672; Generation of Metal Clusters Containing from 2 to 500 Atoms; https://cir.nii.ac.jp/crid/1361699994097201664; Application of the Smoluchowski equation to the formation kinetics of cluster ions; https://cir.nii.ac.jp/crid/1361699994218643584; Advanced Nanocluster Ion Source Based on High-Power Impulse Magnetron Sputtering and Time-Resolved Measurements of Nanocluster Formation; https://cir.nii.ac.jp/crid/1361981471317224064; Thin films from energetic cluster impact: A feasibility study; https://cir.nii.ac.jp/crid/1362262943868587264; Photon-trap spectroscopy of mass-selected ions in an ion trap: Optical absorption and magneto-optical effects; https://cir.nii.ac.jp/crid/1362262945483038592; Tomographic imagings of a plasma structure and sputtered particle in a direct current magnetron discharge; https://cir.nii.ac.jp/crid/1362262946060164224; Parametric study on excitation temperature and electron temperature in low pressure plasmas; https://cir.nii.ac.jp/crid/1362544418345179904; Laser production of supersonic metal cluster beams; https://cir.nii.ac.jp/crid/1363951794022047104; Growth kinetics of Al clusters in the gas phase produced by a magnetron-sputtering source; https://cir.nii.ac.jp/crid/1364233268944696576
• 連携機関・データベース: 国立情報学研究所 : CiNii Research; https://cir.nii.ac.jp/
• 提供元機関・データベース: Crossref; https://www.crossref.org; CiNii Articles; 科学研究費助成事業データベース; https://kaken.nii.ac.jp/ja
• NII論文ID: 130007757565

• 要約等: We investigate cluster-growth processes in a magnetron-sputtering cluster source by employing silver as a target metal. An optical emission spectrum o...