Cluster size dependence of sputtering yield by cluster ion beam irradiation

• 資料種別: 記事
• タイトル: Cluster size dependence of sputtering yield by cluster ion beam irradiation
• 著者標目: T. Seki; T. Murase; J. Matsuo
• 出版年月日等: 2006-01
• 出版年（W3CDTF）: 2006-01
• 寄与者: 00402975; 40263123
• タイトル（掲載誌）: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
• 巻号年月日等（掲載誌）: 242 1-2
• 掲載巻: 242
• 掲載号: 1-2
• 掲載ページ: 179-181
• 掲載年月日（W3CDTF）: 2006-01
• ISSN（掲載誌）: 0168583X
• 出版事項（掲載誌）: Elsevier BV
• 件名標目: ion beam; size distribution; empirical formula; cluster; sputtering yield
• 対象利用者: 一般
• DOI: 10.1016/j.nimb.2005.08.023
• 作成日（W3CDTF）: 2005-09-15
• 著作権情報: https://www.elsevier.com/tdm/userlicense/1.0/
• 関連情報（URI）: https://api.elsevier.com/content/article/PII:S0168583X05015004?httpAccept=text/xml; https://api.elsevier.com/content/article/PII:S0168583X05015004?httpAccept=text/plain; http://hdl.handle.net/2433/35036
• 参照: Surface morphology of PMMA surfaces bombarded with size‐selected gas cluster ion beams; https://cir.nii.ac.jp/crid/1360285705274187008; クラスターイオンビーム技術の最近の進展; https://cir.nii.ac.jp/crid/1390001206457677568; The effects of cluster size on sputtering and surface smoothing of PMMA with gas cluster ion beams; https://cir.nii.ac.jp/crid/1390282680489421056; High-Speed Nanoprocessing with Cluster Ion Beams; https://cir.nii.ac.jp/crid/1390565134835600384; Seah’s Universal Equation; https://cir.nii.ac.jp/crid/1390857435060009728
• 連携機関・データベース: 国立情報学研究所 : CiNii Research; https://cir.nii.ac.jp/
• 提供元機関・データベース: Crossref; https://www.crossref.org

• 要約等: In order to investigate the dependence of the sputtering yield on cluster size, surfaces were irradiated with cluster ion beams with various size dist...