水中レーザピーニングによってSi中に形成された欠陥組織の透過電子顕微鏡観察
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- Material Type
- 記事
- Author/Editor
- 岩田 博之沓名 宗春坂 公恭
- Alternative Title
- Transmission Electron Microscopy of Defect Structures Formed in Si by Laser Peening in the Water
- Periodical title
- 日本金属学会誌 = The journal of the Japan Institute of Metals and Materials
- No. or year of volume/issue
- 79(6):2015.6
- Volume
- 79
- Issue
- 6
- Pages
- 308-314