MEMS振動子を用いた絶縁型電圧センサの高耐圧化 (特集 磁気センサ・アクチュエータ材料とその応用)
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- Material Type
- 記事
- Author/Editor
- 和田 祐樹延永 尚記熊谷 慎也石原 裕己石居 真佐々木 実
- Series Title
- Alternative Title
- MEMS Resonator Based Insulated Voltage Sensor Withstanding Higher Voltage
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 137(8):2017.8
- Volume
- 137
- Issue
- 8