医療用ダイアモンド状炭素(DLC)成膜に最適な大電力パルスマグネトロンスパッタ(HiPIMS)用パルス電源の開発

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Material Type: 記事
Title: 医療用ダイアモンド状炭素(DLC)成膜に最適な大電力パルスマグネトロンスパッタ(HiPIMS)用パルス電源の開発
Author/Editor: 黒岩雅英
中谷達行
Author Heading: 黒岩雅英
中谷達行
Alternative Title: Development of Pulse Power Supplies as High Power Impulse Magnetron Sputtering (HiPIMS) Equipment Components for Medical Diamond Like Carbon (DLC) Film Fabrication Processes
Periodical title: Journal of the Vacuum Society of Japan = 真空
No. or year of volume/issue: 60(9):2017.9
Volume: 60
Issue: 9
Pages: 372-375
Publication date of volume/issue (W3CDTF): 2017-09
ISSN (Periodical Title): 1882-2398
ISSN-L (Periodical Title): 1882-2398
Publication (Periodical Title): 東京 : 日本真空協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN15
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-474
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 028531548
http://id.ndl.go.jp/bib/028531548
Bibliographic Record Category (NDL): 632