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CiNii Research
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 福江 紘幸岡野 忠之黒岩 雅英國次 真輔太田 裕己米澤 健中谷 達行
- Alternative Title
- Relationship between discharge characteristics and thin film properties in DLC film deposition using high frequency-high power impulse magnetron sputtering method
- Periodical title
- フロンティア理工学研究所研究報告 = The bulletin of Research Institute of Frontier Science and Technology / 岡山理科大学フロンティア理工学研究所 編
- No. or year of volume/issue
- (3):2021.12
- Issue
- 3
- Pages
- 9-12
- Publication date of volume/issue (W3CDTF)
- 2021-12