酸化グラフェン触媒を用いた半導体の化学エッチング (特集先端半導体へ向けたエッチング技術の開発動向)

酸化グラフェン触媒を用いた半導体の化学エッチング

(特集先端半導体へ向けたエッチング技術の開発動向)

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Material Type: 記事
Title: 酸化グラフェン触媒を用いた半導体の化学エッチング
Author/Editor: 宇都宮徹
Series Title: 特集先端半導体へ向けたエッチング技術の開発動向
Author Heading: 宇都宮徹
Periodical title: Electronics stage = エレクトロニクスステージ / 技術情報協会編
No. or year of volume/issue: 1(5)=5:2026.2
Volume: 1
Issue: 5
Sequential issue number: 5
Pages: 13-17
Publication date of volume/issue (W3CDTF): 2026-02
ISSN (Periodical Title): 2760-3326
ISSN-L (Periodical Title): 2760-3326
Publication (Periodical Title): 東京 : 技術情報協会 = Technical Information Institute
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN32
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z74-H900
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 034615425
http://id.ndl.go.jp/bib/034615425
Bibliographic Record Category (NDL): 632