マスクレスフォトリソグラフィを用いた光回折素子の作製と回折実験

Journal name: 応用物理教育 = Japanese journal of applied physics education 49(2):2025

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Material Type: 記事
Title: マスクレスフォトリソグラフィを用いた光回折素子の作製と回折実験
Author/Editor: 羽渕仁恵
白木英二
Author Heading: 羽渕仁恵
白木英二
Alternative Title: Fabrication of diffractive optical elements using maskless photolithography and diffraction experiments
Periodical title: 応用物理教育 = Japanese journal of applied physics education
No. or year of volume/issue: 49(2):2025
Volume: 49
Issue: 2
Pages: 79-84
Publication date of volume/issue (W3CDTF): 2025
ISSN (Periodical Title): 1346-4434
ISSN-L (Periodical Title): 1346-4434
Publication (Periodical Title): 東京 : 応用物理学会応用物理教育分科会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: maskless photolithography
diffractive optical element
NDLC: ZM35
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z74-B813
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 034674323
http://id.ndl.go.jp/bib/034674323
Bibliographic Record Category (NDL): 632