Variation of Stress and Hardness of a-Sic:H Films with Film Composition

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Material Type: 記事
Title: Variation of Stress and Hardness of a-Sic:H Films with Film Composition
Author/Editor: Sunil Wickramanayaka
Ken Kitamura
Yoichiro Nakanishi 他
Author Heading: Sunil Wickramanayaka
Ken Kitamura
Yoichiro Nakanishi
Periodical title: 静岡大学電子工学研究所研究報告
No. or year of volume/issue: 30(2) 1995
Volume: 30
Issue: 2
Pages: 119～122
Publication date of volume/issue (W3CDTF): 1995
ISSN (Periodical Title): 0286-3383
ISSN-L (Periodical Title): 0286-3383
Publication (Periodical Title): 浜松 : 静岡大学電子工学研究所
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-297
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 3953969
http://id.ndl.go.jp/bib/3953969
Bibliographic Record Category (NDL): 632