プラズマCVDにより作製したSi-B-N膜の電気的,機械的特性

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Material Type: 記事
Title: プラズマCVDにより作製したSi-B-N膜の電気的,機械的特性
Author/Editor: 倉増敬三郎
是近哲広
坂口誠一郎他
Author Heading: 倉増敬三郎
是近哲広
坂口誠一郎
Periodical title: 日本機械学会論文集. A編
No. or year of volume/issue: 62(604) 1996.12
Volume: 62
Issue: 604
Pages: 2645～2650
Publication date of volume/issue (W3CDTF): 1996-12
ISSN (Periodical Title): 0387-5008
ISSN-L (Periodical Title): 0387-5008
Publication (Periodical Title): 東京 : 日本機械学会 ; 1979-2010
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM16
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-737
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 4104498
http://id.ndl.go.jp/bib/4104498
Bibliographic Record Category (NDL): 632