A Single Zone Azimuth Calibration for Rotating Compensator Multichannel Ellipsometry
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- Ilsin AnJaeho LeeKyoung-Yoon Bang 他
- Author Heading
- Periodical title
- Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP
- No. or year of volume/issue
- 42(5A) (通号 575) 2003.5
- Volume
- 42
- Issue
- 5A
- Sequential issue number
- 575
- Pages
- 2872～2875