シリコン単結晶のマイクロ摩耗特性と摩耗組織 (特集 マイクロトライボロジー(基礎から材料工学への応用))
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- Material Type
- 記事
- Author/Editor
- 有馬 則和高木 誠岩田 博之 他
- Series Title
- Periodical title
- 日本金属学会誌 = The journal of the Japan Institute of Metals and Materials
- No. or year of volume/issue
- 67(6) 2003
- Volume
- 67
- Issue
- 6
- Pages
- 269～273