高速マグネトロンスパッタリングによる炭素薄膜の作製 23 4
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Bibliographic Record
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- Material Type
- 記事
- Volume
- 234
- Author/Editor
- 小西 暁夫細川 直吉安納 勝人平塚 一
- Publication Date
- 1980
- Publication Date (W3CDTF)
- 1980
- Alternative Title
- Preparation and Properties of Carbon Films with Magnetron Sputtering
- Periodical title
- 真空Shinku
- No. or year of volume/issue
- 23 4