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Bibliographic Record
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- Material Type
- 文書・図像類
- Author/Editor
- 岡, 克己久保山, 智司松田, 純夫Oka, KatsumiKuboyama, SatoshiMatsuda, Sumio
- Publication, Distribution, etc.
- Publication Date
- 2006-01-20
- Publication Date (W3CDTF)
- 2006-01-20
- Alternative Title
- The evaluation of commercial semiconductor devices by LSI process diagnosis technology
- Periodical title
- 宇宙航空研究開発機構特別資料: 平成16年度総合技術研究本部宇宙領域宇宙科学研究本部合同研究成果報告書:人工衛星系基盤技術 = JAXA Special Publication: FY2004 Report of Joint Research Achievements of the Space Division of Institute of Aerospace Technology and Institute of Space and Astronautical Science: Basic Technologies of Satellite Systems
- No. or year of volume/issue
- JAXA-SP-05-008