次世代フォトリソグラフィーのための光酸発生剤の研究 [論文内容及び審査の要旨]

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Material Type: 博士論文
Title: 次世代フォトリソグラフィーのための光酸発生剤の研究 [論文内容及び審査の要旨]
Author/Editor: 朝倉, 敏景
Author Heading: 朝倉, 敏景
Publication, Distribution, etc.: Hokkaido University
Publication Date: 2014-09-25
Publication Date (W3CDTF): 2014-09-25
Alternative Title: Studies on Photoacid Generators for the Next-generation Photolithography [an abstract of dissertation and a summary of dissertation review]
Contributor: 佐田, 和己
福岡, 淳
長谷川, 靖哉
中野, 環
小山, 靖人
Degree grantor/type: 北海道大学
Dissertation Number: 甲第11581号
Degree Type: 博士(理学)
Text Language Code: jpn
NDC: 400
Target Audience: 一般
Note (General): (主査) 教授佐田和己, 教授福岡淳, 教授長谷川靖哉, 教授中野環, 准教授小山靖人
総合化学院（総合化学専攻）
Access Restrictions: インターネット公開
Rights (production): Creative Commons Attribution-NonCommercial-ShareAlike 2.1 Japan
References (URI): HDL
http://hdl.handle.net/2115/59838
Data Provider (Database): 国立情報学研究所 : 学術機関リポジトリデータベース（IRDB）（機関リポジトリ）
https://irdb.nii.ac.jp
Original Data Provider (Database): 北海道大学 : 北海道大学学術成果コレクション