博士論文

ペロブスカイト構造高誘電率材料の集積化技術に関する研究

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ペロブスカイト構造高誘電率材料の集積化技術に関する研究

Call No. (NDL)
UT51-2001-N721
Bibliographic ID of National Diet Library
000000409485
Persistent ID (NDL)
info:ndljp/pid/3188897
Material type
博士論文
Author
伊藤博巳 [著]
Publisher
[伊藤博巳]
Publication date
[2001]
Material Format
Paper・Digital
Capacity, size, etc.
1冊
Name of awarding university/degree
東北大学,博士 (工学)
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博士論文

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Table of Contents

  • 目次

  • 第一章 緒論

    p1

  • 第二章 ペロブスガイト誘電体キャパシタのSi-LSI集積化技術

    p4

  • 2.1 緒言

    p4

  • 2.2 集樹化の技術課題

    p4

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Paper Digital

Material Type
博士論文
Title
ペロブスカイト構造高誘電率材料の集積化技術に関する研究
Title Transcription
ペロブスカイト コウゾウ コウユウデンリツ ザイリョウ ノ シュウセキカ ギジュツ ニ カンスル ケンキュウ
Author/Editor
伊藤博巳 [著]
Author Heading
伊藤, 博巳 イトウ, ヒロミ
Publication, Distribution, etc.
[伊藤博巳]
Publication Date
[2001]
Publication Date (W3CDTF)
2001
Extent
1冊
Degree grantor/type
東北大学