Plasma deposited thin films / editors, J. Mort, F. Jansen.

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Material Type: 図書
ISBN: 0849351197
Title: Plasma deposited thin films / editors, J. Mort, F. Jansen.
Author Heading: Mort, J.
Jansen, F. (Frank) , Ph. D.
Publication, Distribution, etc.: Boca Raton, Fla. : CRC Press
Publication Date: c1986.
Publication Date (W3CDTF): 1986
Extent: 245 p. : ill. ; 27 cm.
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: 薄膜. Hakumaku.
プラズマ. Purazuma.
電子部品. Densibuhin.
Thin film devices.
Vapor-plating.
Plasma engineering.
LCC: TK7872.T55
DDC: 621.381/7
NDLC: ND371
Note (Bibliography): Includes bibliographies and index.
Holding library: 国立国会図書館
Call No.: ND371-A14
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003144382
http://id.ndl.go.jp/bib/000003144382
LC Control Number: 86023264
https://lccn.loc.gov/86023264
Bibliographic Record Category (NDL): 211