図書

In-process optical metrology for precision machining : Topical meeting : 4th International symposium on optical and optoelectronic applied science and engineering : Mar 1987, The Hague. (SPIE Proceedings ; 802)

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In-process optical metrology for precision machining : Topical meeting : 4th International symposium on optical and optoelectronic applied science and engineering : Mar 1987, The Hague.

(SPIE Proceedings ; 802)

Call No. (NDL)
M17-87-2538
Bibliographic ID of National Diet Library
000003470140
Material type
図書
Author
Society of Photo-Optical Instrumentation Engineers.ほか
Publisher
SPIE
Publication date
1987.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Papers.Index term: in-process optical metrology ; SPIE ; optoelectronic applied science ; precision machining ; ANRT.BL shelfmark: 6823.100 vol 802 19...

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Paper

Material Type
図書
ISBN
0892528370 (pbk)
Title
In-process optical metrology for precision machining : Topical meeting : 4th International symposium on optical and optoelectronic applied science and engineering : Mar 1987, The Hague.
Series Title
SPIE Proceedings ; 802
Author Heading
Society of Photo-Optical Instrumentation Engineers.
Association Nationale de la Recherche Technique.
Publication, Distribution, etc.
SPIE
Publication Date
1987.
Publication Date (W3CDTF)
1987
Extent
v.
Alternative Title
in-process optical metrology ; SPIE ; optoelectronic applied science ; precision machining ; ANRT