Integrated circuit metrology, inspection, and process control 4 : 4th Annual conference : Mar 1990, San Jose, CA. (SPIE Proceedings ; 1261)

Integrated circuit metrology, inspection, and process control 4 : 4th Annual conference : Mar 1990, San Jose, CA.

(SPIE Proceedings ; 1261)

Notes on use

Note (General)：: Papers.Index term: integrated circuit metrology ; process control ; SPIE.BL shelfmark: 6823.100 vol 1261 1990.

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Material Type: 図書
ISBN: 0819403083 (pbk)
Title: Integrated circuit metrology, inspection, and process control 4 : 4th Annual conference : Mar 1990, San Jose, CA.
Series Title: SPIE Proceedings ; 1261
Author Heading: SPIE-The International Society for Optical Engineering.
Publication, Distribution, etc.: SPIE-The International Society for Optical Engineering
Publication Date: 1990.
Publication Date (W3CDTF): 1990
Extent: v.
Alternative Title: integrated circuit metrology ; process control ; SPIE
NDLC: M17
ND
Note (General): Papers.
Index term: integrated circuit metrology ; process control ; SPIE.
BL shelfmark: 6823.100 vol 1261 1990.
Holding library: 国立国会図書館
Call No.: M17-90-1653
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003479175
http://id.ndl.go.jp/bib/000003479175
UKMARC No.: G01496939
Bibliographic Record Category (NDL): 215