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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 1558992359
- ISSN
- 1048-0854
- Title
- Author Heading
- Extent
- v.
- Alternative Title
- Also held in Tokyo, Japan. (Materials Research Society Conference Proceedings)advanced metallization ; ULSI applications ; metallization
- Note (General)
- Papers.Also held in Tokyo, Japan. (Materials Research Society Conference Proceedings)Index term: advanced metallization ; ULSI applications ; metallization.
- Holding library
- 国立国会図書館