Oxide etching with NF3/hydrocarbon chemistries for global warming emissions reduction

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Material Type: 博士論文
Title: Oxide etching with NF3/hydrocarbon chemistries for global warming emissions reduction
Author/Editor: Laura C. Pruette.
Author Heading: Pruette, Laura C.
Publication, Distribution, etc.: Cambridge : Massachusetts Institute of Technology
Publication Date: 2001.
Extent: 4 microfiches ( 306 fr.) : negative, ill. ; 11×15 cm.
Degree Grantor: Massachusetts Institute of Technology
Date Granted: 2001.
Date Granted (W3CDTF): 2001
Note (Dissertation): 博士論文
Thesis (doctoral) --Massachusetts Institute of Technology, 2001.
Place of Publication (Country Code): US
Text Language Code: eng
Note (Material Type): [microform]
Note (Bibliography): Includes bibliographies.
Holding library: 国立国会図書館
Call No.: LS-DIMIT-01-155
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004057512
http://id.ndl.go.jp/bib/000004057512
Bibliographic Record Category (NDL): 216