Si front-end processing -- physics and technology of dopant-defect interactions 3 : symposium held April 17-19, 2001, San Francisco, California, U.S.A. : Symposium J, "si front-end processing -- physics and technology of dopant-defect interactions 3" : 2001 MRS spring meeting : 3rd MRS symposium : Apr 2001, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 669)

Si front-end processing -- physics and technology of dopant-defect interactions 3 : symposium held April 17-19, 2001, San Francisco, California, U.S.A. : Symposium J, "si front-end processing -- physics and technology of dopant-defect interactions 3" : 2001 MRS spring meeting : 3rd MRS symposium : Apr 2001, San Francisco, CA.

(Materials Research Society Symposia Proceedings ; 669)

Call No. (NDL): M17-03-3218
Bibliographic ID of National Diet Library: 000004199206

Material type: 図書

Author: Jones, Erin C.

Publisher: Materials Research Society

Publication date: c2001.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) : ill. ; 24 cm.

NDC: -

Notes on use

Note (General)：: Papers.

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Paper

Material Type: 図書
ISBN: 1558996052
Title: Si front-end processing -- physics and technology of dopant-defect interactions 3 : symposium held April 17-19, 2001, San Francisco, California, U.S.A. : Symposium J, "si front-end processing -- physics and technology of dopant-defect interactions 3" : 2001 MRS spring meeting : 3rd MRS symposium : Apr 2001, San Francisco, CA.
Series Title: Materials Research Society Symposia Proceedings ; 669
Title Heading: Materials Research Society symposia proceedings ; v 669.
Author Heading: Jones, Erin C.
Publication, Distribution, etc.: Warrendale : Materials Research Society
Publication Date: c2001.
Publication Date (W3CDTF): 2001
Extent: 1 v. (various pagings) : ill. ; 24 cm.
Alternative Title: Symposium proceedings : spring 2001
Place of Publication (Country Code): US
Text Language Code: eng
Subject Heading: Semiconductors -- Design and construction -- Congresses.
Semiconductor doping -- Congresses.
Silicon -- Congresses.
Semiconductors -- Defects -- Congresses.
NDLC: M17
Note (General): Papers.
Note (Bibliography): Includes bibliographical references and indexes.
Holding library: 国立国会図書館
Call No.: M17-03-3218
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000004199206
http://id.ndl.go.jp/bib/000004199206
RLIN No.: NYCXV4240871-B
Bibliographic Record Category (NDL): 215