Composition analysis of ECR-grown SiO2 and SiOxFy films SAND-95-1425C DE95 014860 CONF-95051221

Composition analysis of ECR-grown SiO2 and SiOxFy films

SAND-95-1425C DE95 014860 CONF-95051221

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Material Type: 規格・テクニカルリポート類
Title: Composition analysis of ECR-grown SiO2 and SiOxFy films
Author/Editor: Burkhart, J. H
Denison, D
Barbour, J. C
Apblett, C. A
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 15 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : SAND-95-1425C
テクニカルリポート番号 : DE95 014860
テクニカルリポート番号 : CONF-95051221
Holding library: 国立国会図書館
Call No.: LS-DE95/014860
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005533632
http://id.ndl.go.jp/bib/000005533632
Bibliographic Record Category (NDL): 291