Multicusp sources for ion beam lithography applications LBL-36645 DE96 001124 CONF-95051228

Multicusp sources for ion beam lithography applications

LBL-36645 DE96 001124 CONF-95051228

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Material Type: 規格・テクニカルリポート類
Title: Multicusp sources for ion beam lithography applications
Author/Editor: Leung, K. N
Herz, P
Kunkel, W. B
Lee, Y
Perkins, L
Publication Date: 1995
Publication Date (W3CDTF): 1995
Extent: 13 p. (1 microfiche)
Note (Material Type): [microform]
Report No.: テクニカルリポート番号 : LBL-36645
テクニカルリポート番号 : DE96 001124
テクニカルリポート番号 : CONF-95051228
Holding library: 国立国会図書館
Call No.: LS-DE96/001124
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005539616
http://id.ndl.go.jp/bib/000005539616
Bibliographic Record Category (NDL): 291