Stiction recovery of microcantilevers by using excimer laser irradiation AIAA-98-2762

Stiction recovery of microcantilevers by using excimer laser irradiation

AIAA-98-2762

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Material Type: 規格・テクニカルリポート類
Title: Stiction recovery of microcantilevers by using excimer laser irradiation
Author/Editor: Fushinobu, Kazuyoshi
Publication Date: 1998
Publication Date (W3CDTF): 1998
Extent: 6 p
Alternative Title: AIAA/ASME joint thermophysics and heat transfer conference. 7th. Albuquerque, N.M. Jun. 1998
Report No.: テクニカルリポート番号 : AIAA-98-2762
Holding library: 国立国会図書館
Call No.: M-AIAA-98-2762
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000005870913
http://id.ndl.go.jp/bib/000005870913
Bibliographic Record Category (NDL): 291