Reliability of resonant micromachined sensors and actuators SAE-2001-01-0618

Reliability of resonant micromachined sensors and actuators

SAE-2001-01-0618

Call No. (NDL): M-SAE-2001-01-0618
Bibliographic ID of National Diet Library: 000006090234

Material type: 規格・テクニカルリポート類

Author: Sparks, Dほか

Publisher: -

Publication date: 2001

Material Format: Paper

Capacity, size, etc.: 8 p

NDC: -

Search by Bookstore

Search by Bookstore

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type: 規格・テクニカルリポート類
Title: Reliability of resonant micromachined sensors and actuators
Author/Editor: Sparks, D
Chia, M
Zarabadi, S
Publication Date: 2001
Publication Date (W3CDTF): 2001
Extent: 8 p
Alternative Title: SAE world congress. Detroit, Mich. Mar. 2001
Report No.: テクニカルリポート番号 : SAE-2001-01-0618
Holding library: 国立国会図書館
Call No.: M-SAE-2001-01-0618
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000006090234
http://id.ndl.go.jp/bib/000006090234
Bibliographic Record Category (NDL): 291