博士論文

Thermal reaction mechanisms of polycrystalline AIN and SiC with XeF2

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Thermal reaction mechanisms of polycrystalline AIN and SiC with XeF2

Call No. (NDL)
UT51-2004-R192
Bibliographic ID of National Diet Library
000007648196
Material type
博士論文
Author
Morimichi Watanabe [著]
Publisher
[Morimichi Watanabe]
Publication date
2004
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
名古屋大学,博士 (工学)
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Paper

Material Type
博士論文
Author/Editor
Morimichi Watanabe [著]
Author Heading
渡邊, 守道 ワタナベ, モリミチ
Publication, Distribution, etc.
Publication Date
2004
Publication Date (W3CDTF)
2004
Extent
1冊
Alternative Title
多結晶窒化アルミニウムおよび炭化珪素とフッ化キセノン(2)の熱反応機構の研究 タケッショウ チッカ アルミニウム オヨビ タンカ ケイソ ト フッカ キセノン 2 ノ ネツ ハンノウ キコウ ノ ケンキュウ
Degree grantor/type
名古屋大学