Semiconductor machining at the micro-nano scale, 2007 / editors, Jiwang Yan, John Patten.

• Material Type: 図書
• ISBN: 9788178953014
• Title: Semiconductor machining at the micro-nano scale, 2007 / editors, Jiwang Yan, John Patten.
• Author Heading: Yan, Jiwang.; Patten, John.
• Publication, Distribution, etc.: Trivandrum, Kerala : Transworld Research Network
• Publication Date: 2007.
• Publication Date (W3CDTF): 2007
• Extent: 360 p. : ill. (some color) , charts ; 22 cm.
• Place of Publication (Country Code): IN
• Text Language Code: eng
• Subject Heading: Semiconductors -- Design and construction.; Semicondutores.
• NDLC: ND371
• Holding library: 国立国会図書館
• Call No.: ND371-B38
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000010046672; http://id.ndl.go.jp/bib/000010046672
• OCLC No.: 297520606; https://www.worldcat.org/oclc/297520606
• Cataloging Rule: Anglo-American Cataloging Rules
• Bibliographic Record Category (NDL): 211

• Contents: Part 1/ SINGLE- POINT MACHINING PROCESSES: Surface and subsurface integrity in ductile machining of semiconductor materials/ Jiwang YanNumerical simul...