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博士論文

Electrical characterization of HfO2/Ge structure prepared by photo-assisted metal-organic chemical vapor deposition

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Electrical characterization of HfO2/Ge structure prepared by photo-assisted metal-organic chemical vapor deposition

Call No. (NDL)
UT51-2009-C443
Bibliographic ID of National Diet Library
000010260794
Material type
博士論文
Author
Hyun Lee [著]
Publisher
[Hyun Lee]
Publication date
[2009]
Material Format
Paper
Capacity, size, etc.
1冊
Name of awarding university/degree
大阪大学,博士 (工学)
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Paper

Material Type
博士論文
Author/Editor
Hyun Lee [著]
Author Heading
Lee, Hyun イ, ヒョン
Publication, Distribution, etc.
Publication Date
[2009]
Publication Date (W3CDTF)
2009
Extent
1冊
Alternative Title
光-MOCVDを用いたHfO2/Geの構造の作製と電気的特性評価 ヒカリ - MOCVD オ モチイタ HfO2
Degree grantor/type
大阪大学