Design for manufacturability through design-process integration 7 : 27-28 February 2013 : San Jose, California, United States : SPIE conference on design for manufacturability through design-process integration (DfM-DPI) : Feb 2013, San Jose, CA. (SPIE Proceedings ; 8684)

Design for manufacturability through design-process integration 7 : 27-28 February 2013 : San Jose, California, United States : SPIE conference on design for manufacturability through design-process integration (DfM-DPI) : Feb 2013, San Jose, CA.

(SPIE Proceedings ; 8684)

Call No. (NDL): M17-13-3315
Bibliographic ID of National Diet Library: 024618171

Material type: 図書

Author: -

Publisher: SPIE

Publication date: c2013.

Material Format: Paper

Capacity, size, etc.: 1 v. (various pagings) ; 28 cm.

NDC: -

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Notes on use

Note (General)：: Papers."Now in our seventh year of the DfM-DPI conference, (...)" -- introd.

Other physical details：: ill.

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Paper

Material Type: 図書
ISBN: 9780819494665
ISSN (series): 0277786X
Title: Design for manufacturability through design-process integration 7 : 27-28 February 2013 : San Jose, California, United States : SPIE conference on design for manufacturability through design-process integration (DfM-DPI) : Feb 2013, San Jose, CA.
Series Title: SPIE Proceedings ; 8684
Publication, Distribution, etc.: Bellingham : SPIE
Publication Date: c2013.
Publication Date (W3CDTF): 2013
Extent: 1 v. (various pagings)
Other physical details: ill.
Size: 28 cm.
Additional Title: SPIE advanced lithography.
Place of Publication (Country Code): US
Text Language Code: eng
NDLC: M17
Target Audience: 一般
Note (General): Papers.
"Now in our seventh year of the DfM-DPI conference, (...)" -- introd.
Note (Bibliography): Includes bibliographical references and author index.
Holding library: 国立国会図書館
Call No.: M17-13-3315
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 024618171
http://id.ndl.go.jp/bib/024618171
Cataloging Rule: Anglo-American Cataloging Rules
Bibliographic Record Category (NDL): 215