SIMOX

• Material Type: 図書
• ISBN: 086341334X
• Title: SIMOX
• Author/Editor: edited by Maria J. Anc.
• Series Title: Processing series ; no. 4
• Title Heading: EMIS processing series ; no. 4.
• Author Heading: Anc, Maria J.
• Publication, Distribution, etc.: London, United Kingdom : The Institution of Electrical Engineers (出版)
• Publication Date: [2004]
• Publication Date (W3CDTF): 2004
• Extent: xvi, 143 pages
• Other physical details: illustrations
• Size: 26 cm.
• Place of Publication (Country Code): GB
• Text Language Code: eng
• Content Type: text
• Media Type: unmediated
• Carrier Type: volume
• Subject Heading: Silicon-on-insulator technology.
• LCC: TK7871.85
• DDC: 621.31937
• NDLC: ND371
• Target Audience: 一般
• Note (Bibliography): Includes bibliographical references and index.
• Collection (particular): 日本関係外国語図書
• Holding library: 国立国会図書館
• Call No.: ND371-D11
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 030516461; http://id.ndl.go.jp/bib/030516461
• LC Control Number: 2006284939; https://lccn.loc.gov/2006284939
• OCLC No.: 56439055; https://www.worldcat.org/oclc/56439055
• Cataloging Rule: RDA
• Bibliographic Record Category (NDL): 211

• Contents: Introduction / M.J. AncOverview of SIMOX technology: historical perspective / K. IzumiFundamental processes in SIMOX layer formation: ion implantation...