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Bibliographic Record
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- Material Type
- 博士論文
- Title Transcription
- チッカ ガリウム ウェハ ノ シガイセン エンヨウ コウコウリツ ・ テイダメージ カコウ ニ カンスル ケンキュウ
- Author/Editor
- 鷹巣良史 [著]
- Author Heading
- 鷹巣, 良史 タカス, ヨシフミ
- Publication Date
- [2019]
- Publication Date (W3CDTF)
- 2019
- Extent
- 1冊
- Alternative Title
- Ultraviolet assisted processing of gallium nitride wafer for high efficiency and low damage
- Degree grantor/type
- 東北大学