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博士論文

1T1C FeRAM memory array with Hf0.5Zr0.5O2-based ferroelectric film

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1T1C FeRAM memory array with Hf0.5Zr0.5O2-based ferroelectric film

Persistent ID (NDL)
info:ndljp/pid/13116949
Material type
博士論文
Author
奥野, 潤ほか
Publisher
-
Publication date
2023-03
Material Format
Digital
Capacity, size, etc.
-
Name of awarding university/degree
東京工業大学,博士(工学)
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Notes on use

Note (General):

identifier:oai:t2r2.star.titech.ac.jp:50644732

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Digital

Material Type
博士論文
Author/Editor
奥野, 潤
Okuno, Jun
Author Heading
Publication Date
2023-03
Publication Date (W3CDTF)
2023-03
Degree grantor/type
東京工業大学
Date Granted
2023-03-26
Date Granted (W3CDTF)
2023-03-26
Dissertation Number
甲第12384号