Accurate chemical reaction simulation of Si-H-Cl systems through determination of rate coefficients for gas-phase reactions as functions of temperature and pressure

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Accurate chemical reaction simulation of Si-H-Cl systems through determination of rate coefficients for gas-phase reactions as functions of temperature and pressure

Persistent ID (NDL): info:ndljp/pid/13235537

Material type: 博士論文

Author: 野田, 魁人

Publisher: -

Publication date: 2023

Material Format: Digital

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Name of awarding university/degree: 早稲田大学,博士(工学)

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Note (General)：: 早大学位記番号:新9373

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Material Type: 博士論文
Title: Accurate chemical reaction simulation of Si-H-Cl systems through determination of rate coefficients for gas-phase reactions as functions of temperature and pressure
Author/Editor: 野田, 魁人
Author Heading: 野田, 魁人
Publication Date: 2023
Publication Date (W3CDTF): 2023
Alternative Title: 温度・圧力の関数としての気相反応速度係数の導出に基づくSi-H-Cl系の高精度化学反応シミュレーション
Degree grantor/type: 早稲田大学
Date Granted: 2023-09-15
Date Granted (W3CDTF): 2023-09-15
Dissertation Number: 甲第6961号
Degree Type: 博士(工学)
Text Language Code: eng
Target Audience: 一般
Note (General): 早大学位記番号:新9373
Persistent ID (NDL): info:ndljp/pid/13235537
https://dl.ndl.go.jp/pid/13235537
Collection: 障害者向け資料
Collection (Materials For Handicapped People:1): テキストデータ
Collection (particular): 国立国会図書館デジタルコレクション > デジタル化資料 > 博士論文
https://dl.ndl.go.jp/collections/A00014
Acquisition Basis: 博士論文（自動収集）
Date Accepted (W3CDTF): 2024-01-19T16:23:16+09:00
Format (IMT): application/pdf
Access Restrictions: 国立国会図書館内限定公開
Service for the Digitized Contents Transmission Service: 図書館・個人送信対象外
Availability of remote photoduplication service: 可
Periodical Title (URI): http://hdl.handle.net/2065/0002000661
Data Provider (Database): 国立国会図書館 : 国立国会図書館デジタルコレクション
https://dl.ndl.go.jp