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図書

OPPORTUNITIES FOR HIGH ASPECT RATIO MICRO-ELECTRO-MAGNETIC-MECHANICAL SYSTEMS (HAR-MEMMS) AT LAWRENCE BERKELEY LABORATORY. (LBL ; LBL-34767)

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OPPORTUNITIES FOR HIGH ASPECT RATIO MICRO-ELECTRO-MAGNETIC-MECHANICAL SYSTEMS (HAR-MEMMS) AT LAWRENCE BERKELEY LABORATORY.

(LBL ; LBL-34767)

Material type
図書
Author
HUNTER, S.
Publisher
Lawrence Berkeley Laboratory(Lawrence Berkeley Laboratory)
Publication date
1993.
Material Format
Paper
Capacity, size, etc.
260
NDC
-
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Paper

Material Type
図書
Title
OPPORTUNITIES FOR HIGH ASPECT RATIO MICRO-ELECTRO-MAGNETIC-MECHANICAL SYSTEMS (HAR-MEMMS) AT LAWRENCE BERKELEY LABORATORY.
Author/Editor
HUNTER, S.
Series Title
LBL ; LBL-34767
Author Heading
HUNTER, S.
Publication, Distribution, etc.
Lawrence Berkeley Laboratory(Lawrence Berkeley Laboratory)
Publication Date
1993.
Publication Date (W3CDTF)
1993
Extent
260
Place of Publication (Country Code)
us