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図書

ION IMPLANTATION IN COMPOUND SEMICONDUCTORS FOR HIGH-PERFORMANCE ELECTRONIC DEVICES (SAND ; SAND-96-0802C)

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ION IMPLANTATION IN COMPOUND SEMICONDUCTORS FOR HIGH-PERFORMANCE ELECTRONIC DEVICES

(SAND ; SAND-96-0802C)

Material type
図書
Author
ZOLPER, J.C.// BACA, A.G.// SHERWIN, M.E.// KLEM, J.F. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))
Publisher
Sandia National Laboratories(Sandia National Laboratories)
Publication date
1996.
Material Format
Paper
Capacity, size, etc.
12
NDC
-
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Paper

Material Type
図書
Title
ION IMPLANTATION IN COMPOUND SEMICONDUCTORS FOR HIGH-PERFORMANCE ELECTRONIC DEVICES
Author/Editor
ZOLPER, J.C.// BACA, A.G.// SHERWIN, M.E.// KLEM, J.F. (SANDIA NATIONAL LABS., ALBUQUERQUE, NM (UNITED STATES))
Series Title
SAND ; SAND-96-0802C
Author Heading
ZOLPER, J.C.
BACA, A.G.
SHERWIN, M.E.
KLEM, J.F.
Publication, Distribution, etc.
Sandia National Laboratories(Sandia National Laboratories)
Publication Date
1996.
Publication Date (W3CDTF)
1996
Extent
12
Place of Publication (Country Code)
us