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図書

Molecular-dynamics simulation of low-energy beam deposition of silicon (SAND ; SAND-87-0358C; CONF-870224-2; DE87006132)

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Molecular-dynamics simulation of low-energy beam deposition of silicon

(SAND ; SAND-87-0358C; CONF-870224-2; DE87006132)

Material type
図書
Author
Dodson, B.W.
Publisher
Sandia National Labs.
Publication date
1987.1.
Material Format
Paper
Capacity, size, etc.
27p
NDC
-
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Paper

Material Type
図書
Title
Molecular-dynamics simulation of low-energy beam deposition of silicon
Author/Editor
Dodson, B.W.
Series Title
SAND ; SAND-87-0358C; CONF-870224-2; DE87006132
Author Heading
Dodson, B.W.
Publication, Distribution, etc.
Albuquerque, NM (USA) : Sandia National Labs.
Publication Date
1987.1.
Publication Date (W3CDTF)
1989
Extent
27p
Place of Publication (Country Code)
us