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図書

Selective laser-induced photochemical dry etching of semiconductors controlled by ion-bombardment-induced damage (SAND ; SAND-87-1100C; CONF-871027-36; DE88001356)

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Selective laser-induced photochemical dry etching of semiconductors controlled by ion-bombardment-induced damage

(SAND ; SAND-87-1100C; CONF-871027-36; DE88001356)

Material type
図書
Author
Ashby, C.I.H., Myers, D.R., Vook, F.L.
Publisher
Sandia National Labs.
Publication date
1987.1.
Material Format
Paper
Capacity, size, etc.
7p
NDC
-
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Paper

Material Type
図書
Title
Selective laser-induced photochemical dry etching of semiconductors controlled by ion-bombardment-induced damage
Author/Editor
Ashby, C.I.H., Myers, D.R., Vook, F.L.
Series Title
SAND ; SAND-87-1100C; CONF-871027-36; DE88001356
Author Heading
Ashby, C.I.H.
Myers, D.R.
Vook, F.L.
Publication, Distribution, etc.
Albuquerque, NM (USA) : Sandia National Labs.
Publication Date
1987.1.
Publication Date (W3CDTF)
1987
Extent
7p
Place of Publication (Country Code)
us