Journal of micro/nanolithography, MEMS, and MOEMS

Notes on use

Note (General)：: Title from coverVol. 6, no. 1 (Jan./Mar. 2007) bears former ISSN: 1537-1646

List of volumes and issues

There is no corresponding bibliographic record.

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 雑誌
ISSN: 19325150
Title: Journal of micro/nanolithography, MEMS, and MOEMS
Author Heading: Society of Photo-optical Instrumentation Engineers
Publication, Distribution, etc.: SPIE-The International Society for Optical Engineering
Publication Date: c2007-
Publication Date (W3CDTF): 2007
Publication status: 継続刊行中
Publication frequency: 季刊
Size: 28 cm
Alternative Title: JM3
Place of Publication (Country Code): us
Text Language Code: en
Target Audience: 一般
Note (General): Title from cover
Vol. 6, no. 1 (Jan./Mar. 2007) bears former ISSN: 1537-1646
Related Material (URI): https://ci.nii.ac.jp/ncid/AA12228464#entity
https://lccn.loc.gov/2006214529
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/AA12228464 : AA12228464
LC Control Number: 2006214529
https://lccn.loc.gov/2006214529