OSA proceedings on soft X-ray projection lithography : proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California

Author: edited by Andrew M. Hawryluk and Richard H. Stulen ; sponsored by the Optical Society of America

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Note (General)：: "Volume 18""Supported by Air Force Office of Scientific Research, Defense Advance Research Projects Agency, Department of Energy" -- On T.p.Includes b...

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Material Type: 図書
ISBN: 1557523045
Title: OSA proceedings on soft X-ray projection lithography : proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California
Author/Editor: edited by Andrew M. Hawryluk and Richard H. Stulen ; sponsored by the Optical Society of America
Author Heading: Hawryluck, Andrew M.
Stulen, Richard H.
https://ci.nii.ac.jp/author/DA02691015
Topical Meeting
Publication, Distribution, etc.: Optical Society of America
Publication Date: c1993
Publication Date (W3CDTF): 1993
Size: 29 cm
Alternative Title: Soft X-ray projection lithography
Place of Publication (Country Code): us
Text Language Code: en
Subject Heading: X-ray lithography -- Congresses
LCC: TK7874
Target Audience: 一般
Note (General): "Volume 18"
"Supported by Air Force Office of Scientific Research, Defense Advance Research Projects Agency, Department of Energy" -- On T.p.
Includes bibliographical references and index
Related Material (URI): https://ci.nii.ac.jp/ncid/BA69212010#entity
https://lccn.loc.gov/92062915
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BA69212010 : BA69212010
LC Control Number: 92062915
https://lccn.loc.gov/92062915