SEMを用いた圧電アクチュエータの動的微小変位測定法に関する研究

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Material Type: 図書
Title: SEMを用いた圧電アクチュエータの動的微小変位測定法に関する研究
Title Transcription: SEM オモチイタアツデンアクチュエータノドウテキビショウヘンイソクテイホウニカンスルケンキュウ
Author/Editor: 石川博幸 [著]
Author Heading: 石川, 博幸イシカワ, ヒロユキ
Publication, Distribution, etc.: [出版者不明]
Publication Date: [1992]
Publication Date (W3CDTF): 1992
Size: 30cm
Text Language Code: ja
Target Audience: 一般
Note (General): 名古屋大学1991年度博士論文
学位の種類: 工学博士
学位授与年月日: 1992-03-25
報告番号: 甲第2635号
Related Material (URI): https://ci.nii.ac.jp/ncid/BB14702007#entity
Data Provider (Database): 国立情報学研究所 : CiNii Research
Original Data Provider (Database): CiNii Books
https://ci.nii.ac.jp/books
NCID: https://ci.nii.ac.jp/ncid/BB14702007 : BB14702007