Oxidation of Si surface by a pulsed Nd : YAG laser

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Material Type: 記事
Title: Oxidation of Si surface by a pulsed Nd : YAG laser
Author Heading: G Aygun
E Atanassova
A Alacakir
L Ozyuzer
R Turan
Publication Date: 2004-05-13
Publication Date (W3CDTF): 2004-05-13
Periodical title: Journal of Physics D: Applied Physics
No. or year of volume/issue: 37 11
Volume: 37
Issue: 11
Pages: 1569-1575
Publication date of volume/issue (W3CDTF): 2004-05-13
ISSN (Periodical Title): 00223727
Publication (Periodical Title): IOP Publishing
Target Audience: 一般
DOI: 10.1088/0022-3727/37/11/011
https://doi.org/10.1088/0022-3727/37/11/011
Date Created (W3CDTF): 2004-05-13
Related Material (URI): http://stacks.iop.org/0022-3727/37/i=11/a=011/pdf
Is Referenced By: Enhanced oxidation of Si using low-temperature oxidation catalyst SrTi1− xMgxO3−δ
https://cir.nii.ac.jp/crid/1360284924867294336
Data Provider (Database): 国立情報学研究所 : CiNii Research
https://cir.nii.ac.jp/
Original Data Provider (Database): Crossref
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