Plasma-enhanced atomic layer deposition of titanium oxynitrides films: A comparative spectroscopic and electrical study
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- Material Type
- 記事
- Author Heading
- Publication Date
- 2015-11-23
- Publication Date (W3CDTF)
- 2015-11-23
- Periodical title
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- No. or year of volume/issue
- 34 1
- Volume
- 34
- Issue
- 1
- Publication date of volume/issue (W3CDTF)
- 2015-11-23
- ISSN (Periodical Title)
- 07342101
- Publication (Periodical Title)
- American Vacuum Society
- Target Audience
- 一般
- DOI
- 10.1116/1.4936227
- Date Created (W3CDTF)
- 2015-11-23
- Related Material (URI)
- Is Referenced By
- LaTiO<sub>x</sub>N<sub>y</sub> Thin Film Model Systems for Photocatalytic Water Splitting: Physicochemical Evolution of the Solid–Liquid Interface and the Role of the Crystallographic Orientation
- Data Provider (Database)
- 国立情報学研究所 : CiNii Research
- Original Data Provider (Database)
- CrossrefCrossref