化学溶液法による(Bi,Nd)4Ti3O12薄膜作製に及ぼすエキシマUV照射効果

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Summary, etc.：: 強誘電体不揮発性メモリに応用が期待される(Bi,Nd)4Ti3O12(BNT)薄膜の研究が盛んに行われている。本研究では、BNT薄膜を化学溶液法によりPt/TiOx/SiO2/...

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Material Type: 記事
Title: 化学溶液法による(Bi,Nd)4Ti3O12薄膜作製に及ぼすエキシマUV照射効果
Author Heading: 林卓
飯澤直也
戸川大地
水谷祐輝
山田美緒
坂本渉
菊田浩一
余語利信
平野眞一
Publication Date: 2004
Publication Date (W3CDTF): 2004
Periodical title: 日本セラミックス協会　年会・秋季シンポジウム講演予稿集
No. or year of volume/issue: 2004S 0
Volume: 2004S
Issue: 0
Pages: 27-27
Publication date of volume/issue (W3CDTF): 2004
Publication (Periodical Title): The Ceramic Society of Japan
Subject Heading: BNT thin films
excimer UV irradiation
chemical solution deposition
ferroelectric properties
BNT薄膜
エキシマUV照射
化学溶液法
強誘電特性
Target Audience: 一般
DOI: 10.14853/pcersj.2004s.0.27.0
Data Provider (Database): 国立情報学研究所 : CiNii Research
https://cir.nii.ac.jp/
Original Data Provider (Database): Japan Link Center
https://japanlinkcenter.org/top
CiNii Articles
NAID: 130006967358