超臨界CO2流体中での超微細集積回路用薄膜堆積

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Material Type: 記事
Title: 超臨界CO2流体中での超微細集積回路用薄膜堆積
Author Heading: 近藤英一
志鎌耕一郎
Publication Date: 2003
Publication Date (W3CDTF): 2003
Periodical title: 化学工学会　研究発表講演要旨集
No. or year of volume/issue: 2003f 0
Volume: 2003f
Issue: 0
Pages: 405-405
Publication date of volume/issue (W3CDTF): 2003
Publication (Periodical Title): The Society of Chemical Engineers, Japan
Text Language Code: ja
Subject Heading: supercritical carbon dioxide
thin films
copper
Target Audience: 一般
DOI: 10.11491/scej.2003f.0.405.0
Data Provider (Database): 国立情報学研究所 : CiNii Research
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Original Data Provider (Database): Japan Link Center
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CiNii Articles
NAID: 130004662629