サファイア上AlN緩衝層のN2-COアニールとMOVPE法によるAlN成長

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Material Type: 記事
Title: サファイア上AlN緩衝層のN2-COアニールとMOVPE法によるAlN成長
Author Heading: 西尾剛
鈴木周平
三宅秀人
平松和政
福山博之
徳本有紀
山田陽一
https://orcid.org/0000-0002-6395-7876
Publication Date: 2014-03-03
Publication Date (W3CDTF): 2014-03-03
Periodical title: 応用物理学会学術講演会講演予稿集
No. or year of volume/issue: 2014.1 0
Volume: 2014.1
Issue: 0
Pages: 204-204
Publication date of volume/issue (W3CDTF): 2014-03-03
Publication (Periodical Title): The Japan Society of Applied Physics
Text Language Code: ja
Subject Heading: 19p-E13-15
AlN
MOVPE
分科企画シンポジウム
窒化物半導体特異構造の科学　〜成長・作製と新機能の発現〜
窒化物半導体
Target Audience: 一般
Date/Time and Place of an Event: 応用物理学会春季学術講演会
DOI: 10.11470/jsapmeeting.2014.1.0_204
Data Provider (Database): 国立情報学研究所 : CiNii Research
https://cir.nii.ac.jp/
Original Data Provider (Database): Japan Link Center
https://japanlinkcenter.org/top